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Keywords: solid structure
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Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. April 2003, 125(2): 445–447.
Published Online: March 19, 2003
... 6 7 8 . Film hardness depends on the silicon content and the grain size of the crystalline TiN. These films were claimed to be superhard (⩾40 GPa 1 2 3 4 5 6 , up to 80 GPa 9 ) and have high Young’s modulus. thin films coatings nanocomposites ion beam assisted deposition solid...
