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Keywords: ion beam assisted deposition
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Journal Articles

Mechanical Properties of Nanocomposite TiN / Si 3 N 4 Films Synthesized by Ion Beam Assisted Deposition (IBAD)

Chenhui Zhang, Jianbin Luo, Wenzhi Li, Darong Chen
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. April 2003, 125(2): 445–447.
https://doi.org/10.1115/1.1537749
Published Online: March 19, 2003
...Chenhui Zhang; Jianbin Luo; Wenzhi Li; Darong Chen Nanocomposite coatings of TiN / Si 3 N 4 have been prepared by ion beam assisted deposition (IBAD): simultaneous sputtering of Ti and Si targets and film bombardment by N 2 + ions at 1000 eV. The Si/Ti ratio in the film varies from 0 to 0.9...
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Topics: Coatings, Mechanical properties, Nanocomposites, Steel, Wear resistance, Grain size