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Keywords: precision positioning
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. November 2007, 129(6): 777–785.
Published Online: January 23, 2007
... and precisely position an additional payload of 2 kg . Its potential applications include semiconductor manufacturing, microfabrication and assembly, nanoscale profiling, and nanoindentation. actuators assembling capacitive sensors light interferometers magnetic levitation nanotechnology permanent...
Journal Articles