1-20 of 664
Microelectromechanical Systems
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Flow Past a Micro-Sphere in a Pipe: Effects of Rarefaction

Hsin-Chih F. Liu, Ali Beskok, Nikolaos Gatsonis, George E. Karniadakis
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 445-452, November 15–20, 1998
Paper No: IMECE1998-1283
DOI: https://doi.org/10.1115/IMECE1998-1283
View Paper
PDF
Topics: Flow (Dynamics), Pipes, Knudsen number, Algorithms, Design, Drag (Fluid dynamics), Rarefied fluid dynamics, Reynolds number, Simulation, Slip flow
Proceedings Papers

MHD (Magnetohydrodynamic) Micropump Using Lorentz Force

Jaesung Jang, Seung S. Lee
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 439-444, November 15–20, 1998
Paper No: IMECE1998-1282
DOI: https://doi.org/10.1115/IMECE1998-1282
View Paper
PDF
Topics: Magnetohydrodynamics, Micropumps, Flow (Dynamics), Pressure, Electric fields, Fluids, Magnetic induction
Proceedings Papers

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Sumit Majumder, N. E. McGruer, Paul M. Zavracky, Richard H. Morrison, George G. Adams, Jacqueline Krim
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 341-346, November 15–20, 1998
Paper No: IMECE1998-1265
DOI: https://doi.org/10.1115/IMECE1998-1265
View Paper
PDF
Topics: Contact resistance, Modeling, Switches, Gates (Closures), Cantilever beams, Coating processes, Coatings, Currents, Cycles, Electrodes
Proceedings Papers

Convection-Based Accelerometer and Tilt Sensor Implemented in Standard CMOS

Veljko Milanović, Edwin Bowen, Nim Tea, John Suehle, Beverly Payne, Mona Zaghloul, Michael Gaitan
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 487-490, November 15–20, 1998
Paper No: IMECE1998-1289
DOI: https://doi.org/10.1115/IMECE1998-1289
View Paper
PDF
Topics: Accelerometers, Complementary metal oxide semiconductors, Convection, Sensors, Temperature, Temperature sensors, Bridges (Structures), Errors, Natural convection, Thermocouples
Proceedings Papers

A High Performance Hand-Held Gas Chromatograph

Conrad M. Yu, Matthew Lucas, Jackson C. Koo, Paul Stratton, Terri DeLima, Elaine Behymer
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 481-486, November 15–20, 1998
Paper No: IMECE1998-1288
DOI: https://doi.org/10.1115/IMECE1998-1288
View Paper
PDF
Topics: Gas chromatography, Microelectromechanical systems, Sensors, Ejectors, Separation (Technology), Batteries, Bridges (Structures), Computer software, Electrical measurement, Electricity (Physics)
Proceedings Papers

A Micro-Actuator for a Hard-Disk Drive Fine Tracking Servo

Toshiki Hirano, Long-Sheng Fan, Wen Y. Lee, John Hong, Tetsuo Semba, Wayne Imaino, Surya Pattanaik, Susanna Chan, Patrick Webb
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 253-260, November 15–20, 1998
Paper No: IMECE1998-1250
DOI: https://doi.org/10.1115/IMECE1998-1250
View Paper
PDF
Topics: Disks, Microactuators, Servomechanisms, Design, Control equipment, Manufacturing, Stiffness, Density, Electrodeposition, Errors
Proceedings Papers

Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators

Robert A. Conant, Richard S. Muller
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 273-277, November 15–20, 1998
Paper No: IMECE1998-1254
DOI: https://doi.org/10.1115/IMECE1998-1254
View Paper
PDF
Topics: Actuators, Fatigue testing, Micromachining, Cycles, Deformation, Displacement, Failure, High temperature, Microelectromechanical systems, Temperature
Proceedings Papers

A Micromechanical Actuator With Capacitive Position Correction for Phase Shifting Diffraction Interferometry

Charles F. McConaghy, Abraham P. Lee, Gary Sommargren, Don Phillion, Eugene W. Campbell, Jimmy Trevino
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 461-468, November 15–20, 1998
Paper No: IMECE1998-1285
DOI: https://doi.org/10.1115/IMECE1998-1285
View Paper
PDF
Topics: Actuators, Diffraction, Interferometry, Feedback, Circuits, Interferometers, Locks (Waterways), Metrology, Microactuators, Signals
Proceedings Papers

Velocimetry for MEMS Applications

Steven T. Wereley, Carl D. Meinhart, Juan G. Santiago, Ron J. Adrian
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 453-459, November 15–20, 1998
Paper No: IMECE1998-1284
DOI: https://doi.org/10.1115/IMECE1998-1284
View Paper
PDF
Topics: Microelectromechanical systems, Particulate matter, Flow (Dynamics), Resolution (Optics), Algorithms, Brownian motion, Errors, Erythrocytes, Microfluidics, Microscopy
Proceedings Papers

Analysis on Multi-Layered, Corrugated Diaphragm With Residual Stress

Hai Yan, Kuok Chun Lou, Byungchai Lee, Eun Sok Kim
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 373-378, November 15–20, 1998
Paper No: IMECE1998-1271
DOI: https://doi.org/10.1115/IMECE1998-1271
View Paper
PDF
Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Stress, Deflection, Pressure, Residual stresses, Stress concentration, Anisotropy, Design, Finite difference methods
Proceedings Papers

A Constrained Thermal Expansion Micro-Actuator

Rebecca Cragun, Larry L. Howell
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 365-371, November 15–20, 1998
Paper No: IMECE1998-1270
DOI: https://doi.org/10.1115/IMECE1998-1270
View Paper
PDF
Topics: Microactuators, Thermal expansion, Actuators, Compliant mechanisms, Cycles, Deflection, Finite element analysis, Polysilicon, Visualization
Proceedings Papers

Parametric Resonance in a Microelectromechanical Torsional Oscillator

Kimberly L. Turner, Peter G. Hartwell, Fred M. Bertsch, Noel C. MacDonald
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 335-340, November 15–20, 1998
Paper No: IMECE1998-1264
DOI: https://doi.org/10.1115/IMECE1998-1264
View Paper
PDF
Topics: Resonance, Damping, Actuators, Filters, Laser Doppler vibrometers, Microelectromechanical systems, Optical microscopes, Probes
Proceedings Papers

Design of Resonant Beam Transducers: An Axial Force Probe for Atomic Force Microscopy

Jonah A. Harley, Eugene M. Chow, Thomas W. Kenny
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 247-252, November 15–20, 1998
Paper No: IMECE1998-1249
DOI: https://doi.org/10.1115/IMECE1998-1249
View Paper
PDF
Topics: Atomic force microscopy, Design, Probes, Resonance, Transducers, Oscillations, Resolution (Optics), Design engineering, Dimensions, Elastic constants
Proceedings Papers

Thin Film Microresonator for Vacuum Sensing

F. Yuan, C. L. Tom, C. H. Mastrangelo, J. Martin, R. Pfenninger
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 241-246, November 15–20, 1998
Paper No: IMECE1998-1248
DOI: https://doi.org/10.1115/IMECE1998-1248
View Paper
PDF
Topics: Micromechanical resonators, Thin films, Vacuum, Semiconductor wafers, Silicon, Borosilicate glasses, Glass, Manufacturing, Micromachining, Pressure
Proceedings Papers

Self-Assembled Microslider for Microjoinery

L.-S. Huang, B. Sridharan, C.-J. Kim, S. D. Collins, C. González, R. L. Smith
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 499-504, November 15–20, 1998
Paper No: IMECE1998-1291
DOI: https://doi.org/10.1115/IMECE1998-1291
View Paper
PDF
Topics: Self-assembly, Manufacturing, Semiconductor wafers, Bonding, Etching, Anisotropy, Clearances (Engineering), Friction, Micromachining, Polishing
Proceedings Papers

Ceramic Tape-Based Meso Systems Technology

Haim H. Bau, Suresh G. K. Ananthasuresh, Jorge J. Santiago-Avilés, Jihua Zhong, Moon Kim, Mingqiang Yi, Patricio Espinoza-Vallejos, Luis Sola-Laguna
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 491-498, November 15–20, 1998
Paper No: IMECE1998-1290
DOI: https://doi.org/10.1115/IMECE1998-1290
View Paper
PDF
Topics: Ceramics, Glass, Manufacturing, Silicon, Binders (Materials), Firing, Flow (Dynamics), Lamination, Low temperature, Microelectromechanical systems
Proceedings Papers

Crack Growth in Polysilicon MEMS

William W. Van Arsdell, Stuart B. Brown
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 267-272, November 15–20, 1998
Paper No: IMECE1998-1253
DOI: https://doi.org/10.1115/IMECE1998-1253
View Paper
PDF
Topics: Fracture (Materials), Microelectromechanical systems, Polysilicon, Stress, Stress corrosion cracking, Dynamics (Mechanics), Frequency response, Nonlinear dynamics, Nonlinear systems, Water
Proceedings Papers

Tribology on the Macro- to Nanoscales of MEMS Materials: A Review

Bharat Bhushan
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 265-266, November 15–20, 1998
Paper No: IMECE1998-1252
DOI: https://doi.org/10.1115/IMECE1998-1252
View Paper
PDF
Topics: Microelectromechanical systems, Tribology, Friction, Silicon, Polysilicon, Microscale devices, Crystals, Wear, Boundary lubrication, Nanoindentation
Proceedings Papers

Microactuation by Continuous Electrowetting Phenomenon and Silicon Deep RIE Process

Junghoon Lee, Chang-Jin “CJ” Kim
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 475-480, November 15–20, 1998
Paper No: IMECE1998-1287
DOI: https://doi.org/10.1115/IMECE1998-1287
View Paper
PDF
Topics: Reactive-ion etching, Silicon, Electrolytes, Liquid metals, Microchannels, Microelectromechanical systems, Microscale devices, Slug flows, Surface tension, Design
Proceedings Papers

Design and Fabrication of a LIGA-Fabricated Microvalve for Drug Delivery Applications

Timothy W. Tsuei
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 469-473, November 15–20, 1998
Paper No: IMECE1998-1286
DOI: https://doi.org/10.1115/IMECE1998-1286
View Paper
PDF
Topics: Design, Drug delivery systems, Manufacturing, Valves, Actuators, Displacement, Electromagnets, Flow control, Membranes, Micromachining