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Proceedings Papers

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

Mu Chiao, Liwei Lin

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 75-80, November 16–21, 1997

Paper No: IMECE1997-0942

DOI: https://doi.org/10.1115/IMECE1997-0942

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Topics: Microactuators, Microbeams, Computers, Displacement, Image processing, Micromachining, Polysilicon, Thermoelasticity

Proceedings Papers

A Lateral Repulsive-Force Drive Using Asymmetric Electrostatic Field

Ki Bang Lee, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 81-85, November 16–21, 1997

Paper No: IMECE1997-0943

DOI: https://doi.org/10.1115/IMECE1997-0943

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Topics: Atmospheric pressure, Displacement, Electric fields, Electrodes, Electromagnetic induction, Finite element analysis, Microactuators, Micromachining, Polysilicon, Resonance

Proceedings Papers

Characterization of Thin-Film Impact Microactuators

Roger L. Hipwell, Richard S. Muller, Albert P. Pisano

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 87-91, November 16–21, 1997

Paper No: IMECE1997-0944

DOI: https://doi.org/10.1115/IMECE1997-0944

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Topics: Microactuators, Thin films, Actuators, Design, Displacement, Impulse (Physics), Micromachining, Microscale devices, Momentum

Proceedings Papers

Mixture Flow Pattern Recognition Based Upon On-Line Analysis of Physical Parameters

Brian E. Williams, Alice B. Soulek

Proc. ASME. IMECE97, Advances in Bioengineering, 5, November 16–21, 1997

Paper No: IMECE1997-0200

DOI: https://doi.org/10.1115/IMECE1997-0200

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Topics: Flow (Dynamics), Pattern recognition, Fluids, Dynamics (Mechanics), Pressure, Bioengineering, Blood, Computer-aided engineering, Design, Electronics

Proceedings Papers

A Micro-Actuator for a Hard-Disk Drive Fine Tracking Servo

Toshiki Hirano, Long-Sheng Fan, Wen Y. Lee, John Hong, Tetsuo Semba, Wayne Imaino, Surya Pattanaik, Susanna Chan, Patrick Webb

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 253-260, November 15–20, 1998

Paper No: IMECE1998-1250

DOI: https://doi.org/10.1115/IMECE1998-1250

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Topics: Disks, Microactuators, Servomechanisms, Design, Control equipment, Manufacturing, Stiffness, Density, Electrodeposition, Errors

Proceedings Papers

A Micromechanical Actuator With Capacitive Position Correction for Phase Shifting Diffraction Interferometry

Charles F. McConaghy, Abraham P. Lee, Gary Sommargren, Don Phillion, Eugene W. Campbell, Jimmy Trevino

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 461-468, November 15–20, 1998

Paper No: IMECE1998-1285

DOI: https://doi.org/10.1115/IMECE1998-1285

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Topics: Actuators, Diffraction, Interferometry, Feedback, Circuits, Interferometers, Locks (Waterways), Metrology, Microactuators, Signals

Proceedings Papers

A Constrained Thermal Expansion Micro-Actuator

Rebecca Cragun, Larry L. Howell

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 365-371, November 15–20, 1998

Paper No: IMECE1998-1270

DOI: https://doi.org/10.1115/IMECE1998-1270

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Topics: Microactuators, Thermal expansion, Actuators, Compliant mechanisms, Cycles, Deflection, Finite element analysis, Polysilicon, Visualization

Proceedings Papers

Optimal Shape Design of Three Dimensional MEMS With Applications to Electrostatic Comb Drives

Wenjing Ye, Subrata Mukherjee

Proc. ASME. IMECE98, Computational Methods for Solution of Inverse Problems in Mechanics, 23-30, November 15–20, 1998

Paper No: IMECE1998-0217

DOI: https://doi.org/10.1115/IMECE1998-0217

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Topics: Actuators, Boundary element methods, Capacitance, Design, Displacement, Inverse problems, Microactuators, Microelectromechanical systems, Motors, Optimization

Proceedings Papers

Structure and Behavior of Materials for Micromechanical Devices

Peter Krulevitch, Kirk P. Seward, Harold D. Ackler, George C. Johnson, Roger T. Howe

Proc. ASME. IMECE98, Mechanical Behavior of Advanced Materials, 131-133, November 15–20, 1998

Paper No: IMECE1998-1146

DOI: https://doi.org/10.1115/IMECE1998-1146

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Topics: Buckling, Crystallization, Electron microscopy, Etching, Fatigue, Film thickness, Fracture (Materials), Fracture (Process), Mechanical behavior, Microactuators

Proceedings Papers

Precision Piezoelectric Micro-Positioner for Line Boring Bar Tool Insert

George P. O’Neal, Byung-Kwon Min, Chen-Jung Li, Zbigniew J. Pasek, Yoram Koren, Phil Szuba

Proc. ASME. IMECE98, Vibration and Noise Control, 99-106, November 15–20, 1998

Paper No: IMECE1998-0406

DOI: https://doi.org/10.1115/IMECE1998-0406

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Topics: Control equipment, Cutting, Engineering prototypes, Errors, Microactuators, Resolution (Optics), Simulation results

Proceedings Papers

Linear Thermomechanical Microactuators

Rebecca Cragun, Larry L. Howell

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 181-188, November 14–19, 1999

Paper No: IMECE1999-0265

DOI: https://doi.org/10.1115/IMECE1999-0265

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Topics: Microactuators, Thermomechanics, Deflection, Actuators, Cross section (Physics), Design, Finite element analysis, Micromachining, Polysilicon, Symmetry (Physics)

Proceedings Papers

Laser Opto Microactuators Rotated by Molecular Gas Dynamics Effects

Masahiro Ota, Yu-ichi Watanabe, Moriyoshi Sakamoto

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 405-411, November 14–19, 1999

Paper No: IMECE1999-0298

DOI: https://doi.org/10.1115/IMECE1999-0298

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Topics: Gasdynamics, Lasers, Microactuators, Germanium, Rotors, Silicon, Thin films, Aluminum, Oxidation, Reflectance

Proceedings Papers

A New Transverse Electromagnetic Microactuator Using the Radial Magnetic Field Guided by Symmetric Twin Magnets

Ji-Chul Ryu, Tae Goo Kang, Young-Ho Cho

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 105-109, November 14–19, 1999

Paper No: IMECE1999-0253

DOI: https://doi.org/10.1115/IMECE1999-0253

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Topics: Magnetic fields, Magnets, Microactuators, Diaphragms (Mechanical devices), Diaphragms (Structural), Copper, Q-factor, Resonance, Silicon

Proceedings Papers

The Fabrication of Thin Film NiTi Shape Memory Alloy Micro Actuator for MEMS Application

John J. Gill, Ken Ho, Gregory P. Carman

Proc. ASME. IMECE99, Adaptive Structures and Material Systems, 125-131, November 14–19, 1999

Paper No: IMECE1999-0536

DOI: https://doi.org/10.1115/IMECE1999-0536

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Topics: Manufacturing, Microactuators, Microelectromechanical systems, Nickel titanium alloys, Thin films, Temperature, Shapes, Membranes, Actuators, Finishes

Proceedings Papers

Theoretical and Experimental Analysis of Coupled Vibration of a Microcantilever Array

Hiroshi Hosaka, Kiyoshi Itao

Proc. ASME. IMECE99, Dynamic Systems and Control, 149-156, November 14–19, 1999

Paper No: IMECE1999-0020

DOI: https://doi.org/10.1115/IMECE1999-0020

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Topics: Experimental analysis, Microcantilevers, Vibration, Damping, Air flow, Cantilevers, Internal friction, Microactuators, Resonance, Sensors

Proceedings Papers

Surface Micromachined Electrothermal V-Beam Micromotors

David S. Schreiber, Wei-Jen Cheng, John M. Maloney, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 141-147, November 11–16, 2001

Paper No: IMECE2001/MEMS-23821

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23821

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Topics: Microelectromechanical systems, Micromachining, Micromotors, Microactuators, Displacement, Engine design, Engines, Motors, Polysilicon, Reliability

Proceedings Papers

Rotation of Laser Opto-Microactuator With Low-Heat-Conductivity Material

Masahiro Ota, Atsunobu Noguchi

Proc. ASME. IMECE2001, Heat Transfer: Volume 1 — Fundamentals of Heat Transfer, 371-374, November 11–16, 2001

Paper No: IMECE2001/HTD-24143

DOI: https://doi.org/10.1115/IMECE2001/HTD-24143

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Topics: Heat, Lasers, Microactuators, Rotation, Thermal conductivity, Actuators, Blades, Laser beams, Aluminum, Borosilicate glasses

Proceedings Papers

The Resonant Micro Fan for Fluidic Transport, Mixing and Particle Filtering

Ryan J. Linderman, Subham Sett, Victor M. Bright

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 463-470, November 11–16, 2001

Paper No: IMECE2001/MEMS-23868

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23868

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Topics: Microelectromechanical systems, Particle filtering (numerical methods), Resonance, Fans, Flow (Dynamics), Flow visualization, Particulate matter, Ceilings, Channel flow, Deflection

Proceedings Papers

A Novel Attitude Control Technique for Miniature Spacecraft

Jun Li, Sung K. Koh, G. K. Ananthasuresh, P. S. Ayyaswamy, S. Ananthakrishnan

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 277-280, November 11–16, 2001

Paper No: IMECE2001/MEMS-23840

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23840

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Topics: Microelectromechanical systems, Space vehicles, Microactuators, Actuators, Torque

Proceedings Papers

Omnidirectional Walking Microrobot Realized by Thermal Microactuator Arrays

Matthew H. Mohebbi, Mason L. Terry, Karl F. Böhringer, Gregory T. A. Kovacs, John W. Suh

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 167-173, November 11–16, 2001

Paper No: IMECE2001/MEMS-23824

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23824

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Topics: Actuators, Microactuators, Microelectromechanical systems, Degrees of freedom, Micromanipulation

2 3 4 5

NARROW

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

A Lateral Repulsive-Force Drive Using Asymmetric Electrostatic Field

Characterization of Thin-Film Impact Microactuators

Mixture Flow Pattern Recognition Based Upon On-Line Analysis of Physical Parameters

A Micro-Actuator for a Hard-Disk Drive Fine Tracking Servo

A Micromechanical Actuator With Capacitive Position Correction for Phase Shifting Diffraction Interferometry

A Constrained Thermal Expansion Micro-Actuator

Optimal Shape Design of Three Dimensional MEMS With Applications to Electrostatic Comb Drives

Structure and Behavior of Materials for Micromechanical Devices

Precision Piezoelectric Micro-Positioner for Line Boring Bar Tool Insert

Linear Thermomechanical Microactuators

Laser Opto Microactuators Rotated by Molecular Gas Dynamics Effects

A New Transverse Electromagnetic Microactuator Using the Radial Magnetic Field Guided by Symmetric Twin Magnets

The Fabrication of Thin Film NiTi Shape Memory Alloy Micro Actuator for MEMS Application

Theoretical and Experimental Analysis of Coupled Vibration of a Microcantilever Array

Surface Micromachined Electrothermal V-Beam Micromotors

Rotation of Laser Opto-Microactuator With Low-Heat-Conductivity Material

The Resonant Micro Fan for Fluidic Transport, Mixing and Particle Filtering

A Novel Attitude Control Technique for Miniature Spacecraft

Omnidirectional Walking Microrobot Realized by Thermal Microactuator Arrays

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