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Proceedings Papers

Effect of SF 6 and C 4 F 8 Flow Rate on Etched Surface Profile and Grass Formation in Deep Reactive Ion Etching Process

Pallavi Sharma, Matthias Pleil, Nathan Jackson

Proc. ASME. IMECE2022, Volume 9: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging; Safety Engineering, Risk, and Reliability Analysis; Research Posters, V009T13A012, October 30–November 3, 2022

Paper No: IMECE2022-92967

DOI: https://doi.org/10.1115/IMECE2022-92967

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Topics: Etching, Flow (Dynamics), Reactive-ion etching, Silicon, Cooling, Cycles, Corners (Structural elements), Energy dissipation, Gas flow, Heat

Proceedings Papers

Fabrication and Testing of a Multilayer Silicon Fluidic Laminar Proportional Amplifier

Brett H. Piekarski, Robert J. Zeto, Steve M. Tenney, Matthew H. Ervin

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 97-101, November 15–20, 1998

Paper No: IMECE1998-1228

DOI: https://doi.org/10.1115/IMECE1998-1228

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Topics: Manufacturing, Silicon, Testing, Design, Stainless steel, Etching, Flow (Dynamics), Laminates, Milling, Photolithography

Proceedings Papers

Anisotropic Crystalline Etching Simulation Using a Continuous Cellular Automata Algorithm

Zhenjun Zhu, Chang Liu

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 577-582, November 15–20, 1998

Paper No: IMECE1998-1303

DOI: https://doi.org/10.1115/IMECE1998-1303

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Topics: Algorithms, Anisotropy, Etching, Simulation

Proceedings Papers

Fabrication of 109.5° Micro V-Grooves Using a Two-Step Anisotropic Etching Technique

Wen-Tien Chang Chien, Liwei Lin, Yi-Chung Lo, Chia-Ou Chang

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 361-364, November 15–20, 1998

Paper No: IMECE1998-1269

DOI: https://doi.org/10.1115/IMECE1998-1269

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Topics: Anisotropy, Etching, Manufacturing, Shapes, Design, Microelectromechanical systems, Semiconductor wafers

Proceedings Papers

Design, Testing, and Simulation of Microscale Gas Chromatography Columns

Mary L. Hudson, Richard Kottenstette, Carolyn M. Matzke, Greg C. Frye-Mason, Kim A. Shollenberger, Doug R. Adkins, C. Channy Wong

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 207-214, November 15–20, 1998

Paper No: IMECE1998-1244

DOI: https://doi.org/10.1115/IMECE1998-1244

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Topics: Design, Gas chromatography, Microscale devices, Simulation, Testing, Resolution (Optics), Chemistry, Dimensions, Etching, Plates (structures)

Proceedings Papers

Microfluidics of a Planar Microfabricated Fluid Filter

Yit-shun Leung Ki, Didier Maillefer, Gilles Rey-Mermet, Peter A. Monkewitz, Philippe Renaud, Harald T. G. van Lintel

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 165-170, November 15–20, 1998

Paper No: IMECE1998-1238

DOI: https://doi.org/10.1115/IMECE1998-1238

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Topics: Filters, Fluids, Microfabrication, Microfluidics, Design, Filtration, Flow (Dynamics), Micromachining, Pumps, Silicon

Proceedings Papers

Genetic Algorithms in MEMS Synthesis

Hui Li, Erik K. Antonsson

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 299-303, November 15–20, 1998

Paper No: IMECE1998-1258

DOI: https://doi.org/10.1115/IMECE1998-1258

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Topics: Genetic algorithms, Microelectromechanical systems, Shapes, Manufacturing, Simulation, Etching

Proceedings Papers

Numerical Simulation of Radiant Thermal Processing of Bilayer Microcantilevers

Haruna Tada, Ioannis N. Miaoulis, Peter Y. Wong

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 37-44, November 15–20, 1998

Paper No: IMECE1998-1221

DOI: https://doi.org/10.1115/IMECE1998-1221

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Topics: Computer simulation, Microcantilevers, Semiconductor wafers, Etching, Temperature gradient, Emissivity, Separation (Technology), Temperature, Thin films, Design

Proceedings Papers

A Micro-Actuator for a Hard-Disk Drive Fine Tracking Servo

Toshiki Hirano, Long-Sheng Fan, Wen Y. Lee, John Hong, Tetsuo Semba, Wayne Imaino, Surya Pattanaik, Susanna Chan, Patrick Webb

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 253-260, November 15–20, 1998

Paper No: IMECE1998-1250

DOI: https://doi.org/10.1115/IMECE1998-1250

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Topics: Disks, Microactuators, Servomechanisms, Design, Control equipment, Manufacturing, Stiffness, Density, Electrodeposition, Errors

Proceedings Papers

Self-Assembled Microslider for Microjoinery

L.-S. Huang, B. Sridharan, C.-J. Kim, S. D. Collins, C. González, R. L. Smith

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 499-504, November 15–20, 1998

Paper No: IMECE1998-1291

DOI: https://doi.org/10.1115/IMECE1998-1291

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Topics: Self-assembly, Manufacturing, Semiconductor wafers, Bonding, Etching, Anisotropy, Clearances (Engineering), Friction, Micromachining, Polishing

Proceedings Papers

Thermal and Carrier Transport in Laser Photo-Etching of n-GaAs Semiconductor Thin Films

X. Zhang, J. Wen

Proc. ASME. IMECE98, Heat Transfer: Volume 4 — Heat Transfer in Materials Processing, 241-248, November 15–20, 1998

Paper No: IMECE1998-0710

DOI: https://doi.org/10.1115/IMECE1998-0710

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Topics: Etching, Gallium arsenide, Lasers, Semiconductors (Materials), Thin films, Heating, Joules, Diffusion (Physics), Electrons, Photons

Proceedings Papers

A Study on the Effects of Surface Roughness on the Strength of Single Lap Joints

Erol Sancaktar, Rajesh Gomatam

Proc. ASME. IMECE98, Reliability, Stress Analysis, and Failure Prevention Aspects of Adhesive and Bolted Joints, Rubber Components, Composite Springs, 91-111, November 15–20, 1998

Paper No: IMECE1998-1121

DOI: https://doi.org/10.1115/IMECE1998-1121

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Topics: Surface roughness, Adhesives, Abrasion, Adhesion, Boundary layers, Cavities, Etching, Surface finishing, Viscosity, Wetting

Proceedings Papers

Correlation of Fracture Initiation for Microscale Structures: Free-Standing Silicon and Silicon/Glass Interfaces

Martin L. Dunn, Wan Suwito, Paul E. W. Labossiere, Shawn J. Cunningham

Proc. ASME. IMECE98, Mechanical Behavior of Advanced Materials, 157, November 15–20, 1998

Paper No: IMECE1998-1154

DOI: https://doi.org/10.1115/IMECE1998-1154

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Topics: Fracture (Materials), Fracture (Process), Glass, Microscale devices, Silicon, Stress, Etching, Semiconductor wafers, Anisotropy, Bending (Stress)

Proceedings Papers

Structure and Behavior of Materials for Micromechanical Devices

Peter Krulevitch, Kirk P. Seward, Harold D. Ackler, George C. Johnson, Roger T. Howe

Proc. ASME. IMECE98, Mechanical Behavior of Advanced Materials, 131-133, November 15–20, 1998

Paper No: IMECE1998-1146

DOI: https://doi.org/10.1115/IMECE1998-1146

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Topics: Buckling, Crystallization, Electron microscopy, Etching, Fatigue, Film thickness, Fracture (Materials), Fracture (Process), Mechanical behavior, Microactuators

Proceedings Papers

Technology and System Challenges for 300 mm Metal and Polysilicon Plasma Etch

James Papanu, Peter Loewenhardt, Dale Olson, Arnold Kholodenko

Proc. ASME. IMECE98, Manufacturing Science and Engineering, 839-843, November 15–20, 1998

Paper No: IMECE1998-1099

DOI: https://doi.org/10.1115/IMECE1998-1099

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Topics: Etching, Metals, Plasmas (Ionized gases), Polysilicon, Design, Semiconductor wafers, Fluid dynamics, Hardware, Simulation

Proceedings Papers

A Simple Silicon Based Nitric Oxide Sensor

Marcelo Bariatto, Rogerio Furlan, Koiti Arakai, Jorge J. Santiago-Aviles

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 603-607, November 14–19, 1999

Paper No: IMECE1999-0327

DOI: https://doi.org/10.1115/IMECE1999-0327

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Topics: Sensors, Silicon, Microsensors, Calibration, Etching, Manufacturing, Micromachining, Needles, Physiology, Plasma etching

Proceedings Papers

A Novel Fabrication Methodology for Micromachined Sensor-Arrays With Multi-Thickness Configuration

Xinxin Li, Rongming Lin, Minhang Bao

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 269-274, November 14–19, 1999

Paper No: IMECE1999-0279

DOI: https://doi.org/10.1115/IMECE1999-0279

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Topics: Manufacturing, Micromachining, Sensors, Etching, Design, Switches, Anisotropy, Density, Diaphragms (Mechanical devices), Diaphragms (Structural)

Proceedings Papers

Fabrication of a Free Floating Silicon Gate Valve

Alexandros P. Papavasiliou, Dorian Liepmann, Albert P. Pisano

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 435-440, November 14–19, 1999

Paper No: IMECE1999-0302

DOI: https://doi.org/10.1115/IMECE1999-0302

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Topics: Gates (Closures), Manufacturing, Silicon, Valves, Semiconductor wafers, Epoxy adhesives, Epoxy resins, Bonding, Bubbles, Etching

Proceedings Papers

Specific Grinding Energy Causing Thermal Damage in Precision Gear Steels

John E. Mayer, Jr., Angie H. Price, Ganesh K. Purushothaman, Sanjay V. Gopalakrishnan

Proc. ASME. IMECE99, Manufacturing Science and Engineering, 453-457, November 14–19, 1999

Paper No: IMECE1999-0703

DOI: https://doi.org/10.1115/IMECE1999-0703

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Topics: Damage, Gears, Grinding, Steel, Aircraft, Etching, Force measurement, Heat, Helicopters, Rotors

Proceedings Papers

Constrained Layer Damping Treatments for Microstructures

Yi-Chu Hsu, I. Y. Shen

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 807-812, November 11–16, 2001

Paper No: IMECE2001/MEMS-23915

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23915

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Topics: Damping, Microelectromechanical systems, Silicon, Aluminum, Etching, Photoresists, Excitation, Finite element analysis, Frequency response, Laser Doppler vibrometers

2 3 4 5

NARROW

Effect of SF 6 and C 4 F 8 Flow Rate on Etched Surface Profile and Grass Formation in Deep Reactive Ion Etching Process

Fabrication and Testing of a Multilayer Silicon Fluidic Laminar Proportional Amplifier

Anisotropic Crystalline Etching Simulation Using a Continuous Cellular Automata Algorithm

Fabrication of 109.5° Micro V-Grooves Using a Two-Step Anisotropic Etching Technique

Design, Testing, and Simulation of Microscale Gas Chromatography Columns

Microfluidics of a Planar Microfabricated Fluid Filter

Genetic Algorithms in MEMS Synthesis

Numerical Simulation of Radiant Thermal Processing of Bilayer Microcantilevers

A Micro-Actuator for a Hard-Disk Drive Fine Tracking Servo

Self-Assembled Microslider for Microjoinery

Thermal and Carrier Transport in Laser Photo-Etching of n-GaAs Semiconductor Thin Films

A Study on the Effects of Surface Roughness on the Strength of Single Lap Joints

Correlation of Fracture Initiation for Microscale Structures: Free-Standing Silicon and Silicon/Glass Interfaces

Structure and Behavior of Materials for Micromechanical Devices

Technology and System Challenges for 300 mm Metal and Polysilicon Plasma Etch

A Simple Silicon Based Nitric Oxide Sensor

A Novel Fabrication Methodology for Micromachined Sensor-Arrays With Multi-Thickness Configuration

Fabrication of a Free Floating Silicon Gate Valve

Specific Grinding Energy Causing Thermal Damage in Precision Gear Steels

Constrained Layer Damping Treatments for Microstructures

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