Abstract

The design, fabrication and testing of microfabricated thermal shear stress and temperature sensors are sensors is discussed. The devices are fabricated on a silicon substrate with a platinum sensor element 5 microns wide, 1000-Å thick and of varying length. The electrical leads are comprised of 5000-Å of gold deposited above the platinum sensor metal. The sensing area is isolated from the substrate by a thin membrane of silicon nitride covering a vacuum cavity. Test results are presented confirming the good thermal isolation of the sensor element from the substrate as well as the successful operation of the device.

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