In this paper, the use of an accelerometer in precision motion control of linear motors is investigated. The acceleration measurement can provide several advantages. In particular, it can be used with the position measurement for estimation of the position and velocity based on a kinematic model. It can be further utilized for identification of dynamic parameters such as coulomb friction and cogging force as well as for estimation of disturbance. Experimental results verify the effectiveness of the proposed estimation/identification schemes. These schemes are integrated into a two-degree of freedom control system for precision motion control of linear motors. The proposed schemes are evaluated by experiments performed on a linear permanent-magnet motor.

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