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Proceedings Papers

Interrelationship Between Hardness and Resistivity of Metal Alloy Films as Contact Materials in MEMS Switches

S. Mall, H. Lee, K. D. Leedy, R. A. Coutu, Jr.
Proc. ASME. IJTC2006, Part B: Magnetic Storage Tribology; Manufacturing/Metalworking Tribology; Nanotribology; Engineered Surfaces; Biotribology; Emerging Technologies; Special Symposia on Contact Mechanics; Special Symposium on Nanotribology, 1377-1378, October 23–25, 2006
Paper No: IJTC2006-12268
DOI: https://doi.org/10.1115/IJTC2006-12268
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Topics: Alloys, Electrical resistivity, Microelectromechanical systems, Switches, Metals, Platinum, Ruthenium, Thin films, Adhesion, Contact resistance
Proceedings Papers

A Finite Element Model of Asperity Contact With Adhesion and Plasticity

Yan Du, Lei Chen, Nicol E. McGruer, George G. Adams, Izhak Etsion
Proc. ASME. IJTC2006, Part B: Magnetic Storage Tribology; Manufacturing/Metalworking Tribology; Nanotribology; Engineered Surfaces; Biotribology; Emerging Technologies; Special Symposia on Contact Mechanics; Special Symposium on Nanotribology, 1461-1468, October 23–25, 2006
Paper No: IJTC2006-12295
DOI: https://doi.org/10.1115/IJTC2006-12295
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Topics: Adhesion, Finite element model, Plasticity, Deformation, Lennard-Jones potential, Ruthenium, Stress