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Proceedings Papers

Minkowski Sums: A Simulation Tool for CAD/CAM

Anil Kaul
Proc. ASME. CIE92, ASME 1992 International Computers in Engineering Conference: Volume 1 — Artificial Intelligence; Expert Systems; CAD/CAM/CAE; Computers in Fluid Mechanics/Thermal Systems, 447-456, August 2–6, 1992
Publisher: American Society of Mechanical Engineers
Paper No: CIE1992-0053
https://doi.org/10.1115/CIE1992-0053
View Paper titled, Minkowski Sums: A Simulation Tool for CAD/CAM
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Topics: Computer-aided design, Simulation, Algorithms, Path planning, Algebra, Computation, Etching, Interpolation, Process simulation, Robots
Proceedings Papers

Etch Rate Modeling in MEMS Design

Ted J. Hubbard, Erik K. Antonsson
Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A046, August 18–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: 96-DETC/DFM-1310
https://doi.org/10.1115/96-DETC/DFM-1310
View Paper titled, Etch Rate Modeling in MEMS Design
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Topics: Design, Design for Manufacturing, Etching, Microelectromechanical systems, Modeling, Chemical etching, Computer-aided design, Shapes, Silicon, Three-dimensional models
Proceedings Papers

Design Considerations for Manufacturability of MEMS Comb Actuators

Hrishikesh Dixit, Dean L. Taylor, Srikanth Kannapan
Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A047, August 18–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: 96-DETC/DFM-1311
https://doi.org/10.1115/96-DETC/DFM-1311
View Paper titled, Design Considerations for Manufacturability of MEMS Comb Actuators
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Topics: Actuators, Design, Design for Manufacturing, Microelectromechanical systems, Manufacturing, Parametric design, Chemical vapor deposition, Etching, Integrated circuits, Lithography
Proceedings Papers

Design of MEMS via Efficient Simulation of Fabrication

Ted J. Hubbard, Erik K. Antonsson
Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A048, August 18–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: 96-DETC/DFM-1312
https://doi.org/10.1115/96-DETC/DFM-1312
View Paper titled, Design of MEMS via Efficient Simulation of Fabrication
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Topics: Design, Design for Manufacturing, Manufacturing, Microelectromechanical systems, Simulation, Simulation results, Etching
Proceedings Papers

Evolutionary Techniques in MEMS Synthesis

Hui Li, Erik K. Antonsson
Proc. ASME. DETC98, Volume 1A: 25th Biennial Mechanisms Conference, V01AT01A006, September 13–16, 1998
Publisher: American Society of Mechanical Engineers
Paper No: DETC98/MECH-5840
https://doi.org/10.1115/DETC98/MECH-5840
View Paper titled, Evolutionary Techniques in MEMS Synthesis
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Topics: Microelectromechanical systems, Shapes, Genetic algorithms, Manufacturing, Simulation, Etching
Proceedings Papers

Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask

Md Ebrahim Khalil Bhuiyan, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A011, August 17–19, 2020
Publisher: American Society of Mechanical Engineers
Paper No: DETC2020-22497
https://doi.org/10.1115/DETC2020-22497
View Paper titled, Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask
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Topics: Pressure sensors, Sensors, Design, Pressure, Capacitance, Membranes, Dimensions, Engineering simulation, Etching, Finite element analysis
Proceedings Papers

System for In Vivo Nanoinjection of Tissues

Talmage H. Jones, Brian D. Jensen
Proc. ASME. IDETC-CIE2016, Volume 4: 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems, V004T08A002, August 21–24, 2016
Publisher: American Society of Mechanical Engineers
Paper No: DETC2016-60033
https://doi.org/10.1115/DETC2016-60033
View Paper titled, System for In Vivo Nanoinjection of Tissues
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Topics: Biological tissues, Design, Additive manufacturing, Etching, Microscale devices, Shapes, Silicon, Testing
Proceedings Papers

A Novel and Simple Electrochemical Glucose Biosensor Based on a Silicon Nanowire Array Electrode

Che-Wei Hsu, Wen-Chao Feng, Kang J. Chang, Gou-Jen Wang
Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A003, August 17–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: DETC2014-34843
https://doi.org/10.1115/DETC2014-34843
View Paper titled, A Novel and Simple Electrochemical Glucose Biosensor Based on a Silicon Nanowire Array Electrode
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Topics: Biosensors, Electrodes, Glucose, Nanowires, Silicon, Currents, Etching, Glucose sensing, Manufacturing, Metals
Proceedings Papers

High Aspect Ratio Au/Ni Coaxial Nanorod Arrays for Biosensing Applications

Che-Wei Hsu, Gou-Jen Wang
Proc. ASME. IDETC-CIE2013, Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems, V001T09A003, August 4–7, 2013
Publisher: American Society of Mechanical Engineers
Paper No: DETC2013-12869
https://doi.org/10.1115/DETC2013-12869
View Paper titled, High Aspect Ratio Au/Ni Coaxial Nanorod Arrays for Biosensing Applications
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Topics: Nanorods, Nickel, Biosensors, Glucose sensing, Manufacturing, Coating processes, Coatings, Electrodeposition, Electrodes, Etching
Proceedings Papers

Effects of Added Mass on Lead-Zirconate-Titanate (PZT) Thin-Film Microactuators in Aqueous Environments

Chuan Luo, Chen-Wei Yang, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2013, Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems, V001T09A006, August 4–7, 2013
Publisher: American Society of Mechanical Engineers
Paper No: DETC2013-12043
https://doi.org/10.1115/DETC2013-12043
View Paper titled, Effects of Added Mass on Lead-Zirconate-Titanate (PZT) Thin-Film Microactuators in Aqueous Environments
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Topics: Microactuators, Thin films, Diaphragms (Mechanical devices), Diaphragms (Structural), Silicon, Probes, Water, Dimensions, Electrodes, Actuators
Proceedings Papers

Nanomolding of Nanostructured Biodegradable Tissue Engineering Scaffolds

I-Cheng Chung, Ching-Wen Li, Gou-Jen Wang
Proc. ASME. IDETC-CIE2013, Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems, V001T09A001, August 4–7, 2013
Publisher: American Society of Mechanical Engineers
Paper No: DETC2013-12175
https://doi.org/10.1115/DETC2013-12175
View Paper titled, Nanomolding of Nanostructured Biodegradable Tissue Engineering Scaffolds
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Topics: Biodegradation, Tissue scaffolds, Aluminum, Casting, Durability, Electroforming, Embossing, Etching, Fingerprints, Manufacturing
Proceedings Papers

Clustered Cell Parallelization for GPU Computing of Silicon Anisotropic Etching Simulation

Jianhua Li, Jingyuan Chen, Yan Wang, Jianhua Huang
Proc. ASME. IDETC-CIE2013, Volume 2A: 33rd Computers and Information in Engineering Conference, V02AT02A013, August 4–7, 2013
Publisher: American Society of Mechanical Engineers
Paper No: DETC2013-12965
https://doi.org/10.1115/DETC2013-12965
View Paper titled, Clustered Cell Parallelization for GPU Computing of Silicon Anisotropic Etching Simulation
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Topics: Anisotropy, Etching, Graphics processing units, Silicon, Simulation, Atoms, Computation, Computer programming, Crystals, Process simulation
Proceedings Papers

Modeling, Fabrication, and Testing of a Nanoinjection Lance Array for Simultaneous Multi-Cell Injections

Nathan C. Toone, Gregory H. Teichert, Steven J. Brewer, Brian D. Jensen
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 25-32, August 12–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: DETC2012-70471
https://doi.org/10.1115/DETC2012-70471
View Paper titled, Modeling, Fabrication, and Testing of a Nanoinjection Lance Array for Simultaneous Multi-Cell Injections
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Topics: Anisotropy, Cancer, Computers, Design, Electrophoresis, Etching, Manufacturing, Modeling, Particulate matter, Testing
Proceedings Papers

Effects of Air on Enclosure Design of Lead-Zirconate-Titanate (PZT) Thin-Film Diaphragm Microactuators

Chuan Luo, Kai-Yi Hsiao, Perry Cheung, Howard Lin, A. Q. Shen, G. Z. Cao, I. Y. Shen
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 41-47, August 12–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: DETC2012-70061
https://doi.org/10.1115/DETC2012-70061
View Paper titled, Effects of Air on Enclosure Design of Lead-Zirconate-Titanate (PZT) Thin-Film Diaphragm Microactuators
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Topics: Design, Diaphragms (Mechanical devices), Diaphragms (Structural), Microactuators, Thin films, Cavities, Silicon, Stiffness, Electrodes, Springs
Proceedings Papers

GPU-Based Parallel Simulation of Silicon Anisotropic Etching

Jianhua Li, Yan Wang, Jingyuan Chen, Li Yan
Proc. ASME. IDETC-CIE2012, Volume 2: 32nd Computers and Information in Engineering Conference, Parts A and B, 819-829, August 12–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: DETC2012-71267
https://doi.org/10.1115/DETC2012-71267
View Paper titled, GPU-Based Parallel Simulation of Silicon Anisotropic Etching
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Topics: Anisotropy, Etching, Graphics processing units, Silicon, Simulation, Algorithms, Computer programming, Crystals, Thread
Proceedings Papers

Facets and Fissures of a Fractured SOI Wafer

Quentin Aten
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 753, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-87584
https://doi.org/10.1115/DETC2009-87584
View Paper titled, Facets and Fissures of a Fractured SOI Wafer
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Topics: Semiconductor wafers, Silicon-on-insulator, Silicon, Electron microscopy, Etching
Proceedings Papers

Temple of Zeus: A Micro Replica

Aditya N. Das, Rakesh Murthy
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 747, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-87523
https://doi.org/10.1115/DETC2009-87523
View Paper titled, Temple of Zeus: A Micro Replica
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Topics: Epoxy adhesives, Etching, Lenses (Optics), Light sources, Microassembling, Microelectromechanical systems, Needles, Photolithography, Robots, Sapphire
Proceedings Papers

Topology Optimization of Micromachined Structures With the Manufacturing Constraints of KOH Etching of (110) Silicon

Sudarshan Hegde, G. K. Ananthasuresh
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 895-903, August 3–6, 2008
Publisher: American Society of Mechanical Engineers
Paper No: DETC2008-49617
https://doi.org/10.1115/DETC2008-49617
View Paper titled, Topology Optimization of Micromachined Structures With the Manufacturing Constraints of KOH Etching of (110) Silicon
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Topics: Etching, Manufacturing, Micromachining, Optimization, Silicon, Topology, Semiconductor wafers, Chemical etching, Design, Lithographic masks
Proceedings Papers

Piezoelectric T-Beam Microactuators

Hareesh K. R. Kommepalli, Andrew D. Hirsh, Christopher D. Rahn, Srinivas A. Tadigadapa
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 909-914, August 3–6, 2008
Publisher: American Society of Mechanical Engineers
Paper No: DETC2008-49886
https://doi.org/10.1115/DETC2008-49886
View Paper titled, Piezoelectric T-Beam Microactuators
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Topics: Actuators, Displacement, Electrodes, Etching, Flanges, Geometry, Manufacturing, Microactuators, Microelectromechanical systems, Reactive-ion etching
Proceedings Papers

Enabling Soft Lithography Using an Atomic Force Microscope

Matthew S. Johannes, Daniel G. Cole, Robert L. Clark
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 749-757, August 3–6, 2008
Publisher: American Society of Mechanical Engineers
Paper No: DETC2008-49877
https://doi.org/10.1115/DETC2008-49877
View Paper titled, Enabling Soft Lithography Using an Atomic Force Microscope
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Topics: Atomic force microscopy, Lithography, Nanoscale phenomena, Anisotropy, Design, Etching, Molding, Nanolithography, Nanostructures , Silicon