Microelectromechanical chemical and biological sensors have garnered significant interest over the past two decades due to their ability to selectively detect very small amounts of added mass. Today, most resonant mass sensors utilize chemomechanically-induced shifts in the linear natural frequency for detection. In this paper, an alternative, amplitude-based sensing approach, which exploits dynamic transitions across saddle-node bifurcations that exist in a microresonator’s nonlinear frequency response, is investigated. In comparison to their more traditional, linear counterparts, these bifurcation-based sensors have the ability to provide improved sensor metrics, eliminate power-consuming hardware from final sensor implementations, and operate effectively at smaller (e.g. nano) scales. The present work details the ongoing development of a bifurcation-based mass sensor founded upon the near-resonant response of piezoelectrically-actuated microcantilevers. Specifically, the work details the modeling and analysis of these devices, their functionalization, and proof-of-concept mass sensing experiments which not only validate the proposed technique, but allow for the direct evaluation of pertinent sensor metrics.
- Design Engineering Division and Computers and Information in Engineering Division
Modeling, Analysis, and Experimental Validation of a Bifurcation-Based Microsensor
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Kumar, V, Boley, JW, Yang, Y, Ekowaluyo, H, Miller, JK, Chiu, GT, & Rhoads, JF. "Modeling, Analysis, and Experimental Validation of a Bifurcation-Based Microsensor." Proceedings of the ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference. Washington, DC, USA. August 28–31, 2011. pp. 177-186. ASME. https://doi.org/10.1115/DETC2011-48199
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