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REVIEW ARTICLES

Actuators for Micropositioners and Nanopositioners

[+] Author and Article Information
Neal B. Hubbard

 L-3 Communications, Integrated Systems, P.O. Box 154580, MS 1124, Waco, TX 76715

Martin L. Culpepper

Department of Mechanical Engineering,  Massachusetts Institute of Technology, Cambridge, MA 02139culpepper@mit.edu

Larry L. Howell

Department of Mechanical Engineering,  Brigham Young University, Provo, UT 84602lhowell@byu.edu

Appl. Mech. Rev 59(6), 324-334 (Nov 01, 2006) (11 pages) doi:10.1115/1.2345371 History:

A summary of recent research in micropositioning and nanopositioning is presented. The work is classified into five groups by actuation approach, including piezoelectric, magnetic, electrostatic, thermal, and electrochemical microactuators. A consistent set of measurable, key characteristics are proposed: degrees of freedom, range, resolution, range-to-resolution ratio, footprint, force, natural frequency, and bandwidth. Values of the key characteristics are listed in tables. The results demonstrate the boundaries of current knowledge and the advantages of each actuation approach. This is the first time this information has been compiled in this growing field and it is summarized in such a way as to be useful to readers. There are 82 references cited in this review article.

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Copyright © 2006 by American Society of Mechanical Engineers
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References

Figures

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Figure 3

Electrostatic comb drive

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Figure 4

Thermal actuator, adapted from Ref. 67

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Figure 5

Electrochemical actuator, adapted from Ref. 60

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Figure 6

Operation of a scratch drive actuator, adapted from Ref. 72

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Figure 1

Piezoelectric nanopositioner

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Figure 2

Magnetic nanopositioner, adapted from Ref. 40

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