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REVIEW ARTICLES

Microscale pumping technologies for microchannel cooling systems

[+] Author and Article Information
Vishal Singhal, Suresh V Garimella, Arvind Raman

NSF Cooling Technologies Research Center, School of Mechanical Engineering, Purdue University, 585 Purdue Mall, West Lafayette, Indiana 47907-2088; sureshg@ecn.purdue.edu

Appl. Mech. Rev 57(3), 191-221 (Jun 10, 2004) (31 pages) doi:10.1115/1.1695401 History: Online June 10, 2004
Copyright © 2004 by ASME
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References

Figures

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Principle of operation of a rotary micropump
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a) Vibrating diaphragm micropump, b) action in the suction mode, and c) action in the pumping mode
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Structure and operation of a peristaltic micropump. The flow direction can be reversed by changing the actuation sequence of the diaphragms.
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Schematics of a) Induction-type, b) Injection-type, and c) Polarization-type EHD micropumps. All these pumps are bi-directional; representative flow directions are shown.
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a) Schematic of an electroosmotic micropump and b) Velocity profile in the channel cross-section. The flow direction can be reversed by changing the polarity of the electrodes.
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Schematic and operation of an MHD micropump. The flow direction can be reversed by changing the polarity of the electrodes.
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Principle of operation of a bubble micropump. The flow direction can be reversed by changing the sequence of operation of the heaters.
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Schematic and operation of an electrochemical micropump
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Flexural plate wave micropump: a) Top view and b) Side view. The flow direction can be reversed by changing the polarity of the electrodes.
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Structure of the internal-gear rotary micropump 2122
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Structure and operation of the two-gear rotary micropump 24. The coupling ring and the magnets surrounding the structure are not shown in the figure. The flow direction can be reversed by changing the direction of the magnetic field.
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Ferrofluid-actuated rotary micropump 25. The flow direction can be reversed by changing the direction of the rotor.
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a) Vibrating diaphragm micropump 31 and b) passive check valves used in the pump
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Structure of the stereolithographically fabricated micropump 34
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Structure of the piezoelectric micropump with no valves. The pump utilizes the elastic buffer and the variable gap mechanism 35.
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Electrostatically actuated micropump 9
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Dual-diaphragm pump 66: a) Side view and b) Top view through chamber. The flow direction can be reversed by changing the actuation sequence of the electrodes.
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Operation and structure of an electromagnetically actuated micropump 71 (actuation unit not shown): a) Suction mode and, b) Pumping mode
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Vibrating diaphragm micropump using thermopneumatic actuation 76
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Shape memory alloy micropump 78: a) Suction mode and b) Pumping mode
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Shape memory alloy micropump with a) no bias pressure and b) positive bias pressure 80
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One chamber in the light driven micropump of Mizoguchi et al. 85
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Flow rectification in a valveless micropump: a) Expansion mode, and b) Contraction mode. The thicker arrows imply higher volume flow rates.
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Nozzle-diffuser micropump 89
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Structure and operation of the nozzle-diffuser pump presented in 90
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Structure of a valvular conduit described in 96 and resultant fluid flow direction
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Structure of the valveless micropump presented in 115. The flow direction can be reversed by changing the actuation sequence of the heaters relative to that of the PZT actuator.
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Peristaltic micropump 10. The flow direction can be reversed by changing the actuation sequence of the diaphragms.
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Thermopneumatically actuated micropump 116. The flow direction can be reversed by changing the actuation sequence of the membranes.
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Structure of the injection-type EHD pump 12119. The flow direction can be reversed by changing the polarity of the electrodes.
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Cross-section of the MHD pump presented by Lemoff and Lee 140. The pumping direction is perpendicular to the plane of the paper.
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Operation of the bubble pump of Jun and Kim 16144 under a) single-bubble mechanism and b) multiple-bubble mechanism. The flow direction can be reversed by changing the actuation sequence of the heaters.
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Structure of the bubble micropump presented by Geng et al. 152
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Operation of the bubble pump presented by Tsai and Lin 153 when a) heaters are on (bubble expanding) and b) heaters are off (bubble collapsing)
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Flexural plate wave device 18156. The flow direction can be reversed by changing the polarity of the electrodes.
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Structure of the micropump presented by Namasivayam et al. 169
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a) Maximum flow rate per unit cross-sectional area at zero back pressure and b) maximum back pressure at zero flow rate of various micropumps presented in literature. The maximum back pressure was not reported for the Shape Memory Alloy pump 79, Induction-type EHD pump 123124, MHD pump 140 and Flexural Plate Wave pump 160.

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